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Silane, SiH4 Specialty Gas

Silane, SiH4 Specialty Gas

CAS NO  7803-62-5
UN NO  2203
EINECS NO  232-263-4
Molecular weight  32.117
Appearance  Colorless, Garlic Smell
Melting point  -185 ℃
Boiling point  -112 ℃
Density  1.34 kg/m³
DOT Class  2.1
Label  Flammable Gas
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Description

Silane is a colorless gas with a disgusting garlic odor and is soluble in water. Silane is chemically active and can spontaneously ignite in the air without an external ignition source.

Application

For the production of thin-film solar cells.

Used as a silicon source in the epitaxial growth process of large scale integrated circuits.

For glass production.

Industrial Grade

Specification99.9999%
Carbon Monoxide≤ 0.05 ppm
Carbon Dioxide≤ 0.05 ppm
Total chloride≤ 0.1 ppm
Methane≤ 0.05 ppm
C2-C4≤ 0.1 ppm
Nitrogen≤ 0.5 ppm
Oxygen≤ 0.05 ppm
Moisture≤ 0.1 ppm
Silyl Ether≤ 0.1 ppm
Methyl Silane≤ 0.1 ppm
Disilane≤ 0.3 ppm
Hydrogen≤ 20 ppm
Aluminum≤ 0.02 ppba
Antimony≤ 0.02 ppba
Arsenic≤ 0.02 ppba
Gallium≤ 0.02 ppba
Boron≤ 0.02 ppba
Phosphorus≤ 0.02 ppba
Iron + Chromium + Nickel + Copper + Zinc≤ 1 ppba
Other Grades and Purity Available on Asking

Package Information

Cylinder CapacityValveWeight
47LDISS63210 kgs
440LDISS632120 kgs
Other Packages Available on Asking

Reference

Packing and Delivery

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